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January 9, 2017

10. Precise etch-depth control of microlens-integrated intracavity contacted vertical-cavity surface-emitting lasers by in-situ laser reflectometry and reflectivity modeling

Y. M. Song, K. S. Chang, B. H. Na, J. S. Yu, and Y. T. Lee

Thin Sold Films 517, 5773 (2009).



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